News from FlexSiMirror
Actuality from the project
Since its launch, the PEPR FlexSiMirror targeted project has laid the technological foundations necessary for the development of a new generation of deformable mirrors combining a thin silicon surface, electroactive materials and advanced metrology tools.
- LGEF / INSA Lyon : Development of Electroactive Materials
INSA Lyon has set up an ISO 7 cleanroom dedicated to the manufacture and characterisation of the project’s materials, ensuring optimal conditions for experimental development.
The teams have optimised the materials best suited to the production of electrostrictive actuators designed to operate at high frequencies. They have also developed an original methodology enabling the precise characterisation of the electromechanical behaviour of the electroactive polymers used in the project.
This work has led to the validation of a model describing the electrostrictive behaviour of the reference material in the kilohertz range, a crucial step in the design of future actuators. Several optimisation strategies were also explored, enabling a significant improvement in the material’s performance and an increase in the deformations achieved under electrical excitation.
The results were presented in a scientific paper at the SPIE Smart Structures + Nondestructive Evaluation 2026 international conference.
- École des Mines de Saint-Étienne (EMSE) : Mastery of Silicon Substrates and their Flexible Interconnections
EMSE has successfully developed processes for thinning 4-inch-diameter silicon substrates, achieving thicknesses of 300 μm and 150 μm whilst maintaining a surface quality compatible with the project’s objectives.
These substrates are a key component in the development of future deformable mirror architectures that are lighter and more efficient.
Initial work on the printing of flexible interconnect structures has also begun, paving the way for the development of integrated conductive circuits for future electroactive structures.
- Laboratoire d’Astrophysique de Marseille (LAM) : New Methods of Optical Characterisation
The LAM has refined interferometric measurement methods to adapt them to the specific geometries of the actuators developed as part of the project.
This work has led to the development of a new approach to optical metrology, known as PISCO (Pistil Cartesian Optimised), designed to characterise the surfaces of deformable mirrors with very high precision.
Simulation and experimental development work has laid the foundations for a future very high-resolution characterisation bench, designed to evaluate the performance of mirrors for demanding applications such as high-precision astronomy and the detection of exoplanets.
- Centre de Recherche Astrophysique de Lyon (CRAL) : Metrology, Inspection, Systems Integration and Coordination.
CRAL was responsible for the scientific and technical coordination of the project, whilst developing the tools required to characterise and control future deformable mirrors.
The team defined the system’s experimental architecture, designed a new control system capable of eventually managing several hundred actuators, and initiated the manufacture of an initial prototype featuring 36 actuators (Figures 1 and 2).
At the same time, a dedicated metrology and testing bench was developed (Figures 1 and 2) to validate the measurement and control methods. The work also drew on the iMZ self-referenced interferometer, a technology patented by the laboratory (Langlois, Moretto, Lupias and Graf) that enables nanometre-scale measurements of optical surfaces.
Advanced numerical simulations and developments in additive manufacturing have finally made it possible to optimise the design of future deformable mirrors and to prepare for the next stages of integration.
The results obtained also open up significant opportunities for commercialisation, with the preparation of an iMZ @EIC Transition project and the international extension of the patent associated with iMZ technology.
Focus
Since its launch, the PEPR FlexSiMirror targeted project has laid the technological foundations necessary for the development of a new generation of deformable mirrors combining a thin silicon surface, electroactive materials and advanced metrology tools.
- LGEF / INSA Lyon : Development of Electroactive Materials
INSA Lyon has set up an ISO 7 cleanroom dedicated to the manufacture and characterisation of the project’s materials, ensuring optimal conditions for experimental development.
The teams have optimised the materials best suited to the production of electrostrictive actuators designed to operate at high frequencies. They have also developed an original methodology enabling the precise characterisation of the electromechanical behaviour of the electroactive polymers used in the project.
This work has led to the validation of a model describing the electrostrictive behaviour of the reference material in the kilohertz range, a crucial step in the design of future actuators. Several optimisation strategies were also explored, enabling a significant improvement in the material’s performance and an increase in the deformations achieved under electrical excitation.
The results were presented in a scientific paper at the SPIE Smart Structures + Nondestructive Evaluation 2026 international conference.
- École des Mines de Saint-Étienne (EMSE) : Mastery of Silicon Substrates and their Flexible Interconnections
EMSE has successfully developed processes for thinning 4-inch-diameter silicon substrates, achieving thicknesses of 300 μm and 150 μm whilst maintaining a surface quality compatible with the project’s objectives.
These substrates are a key component in the development of future deformable mirror architectures that are lighter and more efficient.
Initial work on the printing of flexible interconnect structures has also begun, paving the way for the development of integrated conductive circuits for future electroactive structures.
- Laboratoire d’Astrophysique de Marseille (LAM) : New Methods of Optical Characterisation
The LAM has refined interferometric measurement methods to adapt them to the specific geometries of the actuators developed as part of the project.
This work has led to the development of a new approach to optical metrology, known as PISCO (Pistil Cartesian Optimised), designed to characterise the surfaces of deformable mirrors with very high precision.
Simulation and experimental development work has laid the foundations for a future very high-resolution characterisation bench, designed to evaluate the performance of mirrors for demanding applications such as high-precision astronomy and the detection of exoplanets.
- Centre de Recherche Astrophysique de Lyon (CRAL) : Metrology, Inspection, Systems Integration and Coordination.
CRAL was responsible for the scientific and technical coordination of the project, whilst developing the tools required to characterise and control future deformable mirrors.
The team defined the system’s experimental architecture, designed a new control system capable of eventually managing several hundred actuators, and initiated the manufacture of an initial prototype featuring 36 actuators (Figures 1 and 2).
At the same time, a dedicated metrology and testing bench was developed (Figures 1 and 2) to validate the measurement and control methods. The work also drew on the iMZ self-referenced interferometer, a technology patented by the laboratory (Langlois, Moretto, Lupias and Graf) that enables nanometre-scale measurements of optical surfaces.
Advanced numerical simulations and developments in additive manufacturing have finally made it possible to optimise the design of future deformable mirrors and to prepare for the next stages of integration.
The results obtained also open up significant opportunities for commercialisation, with the preparation of an iMZ @EIC Transition project and the international extension of the patent associated with iMZ technology.
During the second phase of the project, the partners in the PEPR FlexSiMirror targeted project will focus their efforts on integrating the technologies developed, validating them experimentally and building the final demonstrator: a 20 cm deformable mirror prototype incorporating several hundred to several thousand actuators.
The roadmap for the remaining months is as follows:
- INSA Lyon
- To develop and integrate the electroactive polymers required for the fabrication of printed electroactive assemblies.
- To characterise the electrical, mechanical and electroactive properties of these structures.
- To explore active multilayer architectures with a view to improving device performance.
- École des Mines de Saint-Étienne (EMSE)
• To continue optimising thinned silicon membranes.
• To develop flexible electrodes compatible with electroactive polymers.
• To investigate the electrical properties of conductive inks and their interaction with electroactive materials.
• To analyse the mechanisms of electrical failure observed under high voltage.
• Assess the performance, durability and ageing behaviour of flexible printed circuits.
- Laboratoire d’Astrophysique de Marseille (LAM)
• Improve phase-shift interferometry systems.
• Develop new data processing algorithms.
• Finalise the simulation models associated with the measurement methods.
• Carry out characterisation campaigns on the mirrors developed as part of the project.
- Centre de Recherche Astrophysique de Lyon (CRAL)
• Continue to develop metrology and control systems.
• Implement closed-loop and real-time control strategies.
• Ensure the integration of the various technological building blocks developed by the partners.
• Test and validate the project’s experimental demonstrators.
• Ensure the continuity of activities relating to commercialisation, innovation, risk mitigation and project coordination.
Relation with others WP
The FlexSiMirror project (@CRAL) maintains close links with the XAO WFS targeted project (@CRAL), which is dedicated to the development of new ultra-sensitive wavefront analysers for adaptive optics and precision metrology. Both projects share common scientific challenges relating to the measurement, control and correction of advanced optical systems.
This complementarity fosters the exchange of expertise, the sharing of tools and the development of common methodologies, particularly in the field of interferometric metrology. It has already led to the emergence of opportunities for joint commercialisation, particularly centred on the iMZ interferometry technology developed at CRAL. More broadly, this collaboration helps to strengthen synergies within the Origins PEPR and to accelerate the development of innovative solutions for the astronomy and optical instrumentation of the future.
Relation with industries
The FlexSiMirror project relies on close collaboration with industrial partners to bridge the gap between scientific developments and the need for advanced optical instrumentation. CRAL plays a central role in this process, providing scientific and technical coordination for the project, as well as carrying out metrology, real-time calibration and validation of deformable mirrors.
As part of this, CRAL has worked with OKO (Amsterdam) to define the specifications for a new control system capable of controlling between 100 and 1,000 actuators via multiplexing, paving the way for next-generation deformable mirror architectures.
Development work has also been carried out in partnership with companies specialising in simulation (SIMTEC, Grenoble) and additive manufacturing (Kronos Mechatronics, Nuremberg), with a view to optimising the design and performance of the devices currently under development.
Furthermore, plans to set up a start-up are under consideration with a view to driving the development and commercialisation of iMZ self-referenced interferometry technology for high-impact industrial and scientific applications. With this in mind, a commercialisation drive is currently underway, including the international extension of the patent associated with iMZ and the preparation of an EIC Transition-type project aimed at increasing its level of technological maturity.
